This standard specifies the requirements, inspection methods, inspection rules, marking, packaging, transportation, storage, quality certificate and order form (or contract) content for silicon polished recycled flakes. This standard applies to silicon recycling wafers (mainly including 100 mm, 125 mm, 150 mm and 200 mm single-sided or double-sided polished silicon wafers, unpolished silicon wafers or epitaxial silicon wafers) provided by users or sourced from third parties. Silicon polished wafer prepared by surface polishing. Products are mainly used for monitoring films in machinery, furnace processing, particle and photolithography. In addition, users need to pay attention to the thermal history, body contamination and surface deposits of the silicon recycling sheets.
YS/T 985-2014 Referenced Document
GB/T 11073 Standard method for measuring radial resistivity variation on silicon slices
GB/T 12962 Silicon single crystal*， 2017-01-01 Update