GB/T 6616-2023
Non-contact eddy current method for testing semiconductor wafer resistivity and semiconductor film sheet resistance (English Version)

Standard No.

GB/T 6616-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 6616-2023

Replace

GB/T 6616-2009

GB/T 6616-2023 history

• 2023 GB/T 6616-2023 Non-contact eddy current method for testing semiconductor wafer resistivity and semiconductor film sheet resistance
• 2009 GB/T 6616-2009 Test methods for measuring resistivity of semiconductor wafers or sheet resistance of semiconductor films with a noncontact eddy-current gauge
• 1995 GB/T 6616-1995 Test method for measuring resistivity of semiconductor silicon or sheet resistance of semiconductor films with a noncontact eddy-current gage