GB/T 6624-2009
Standard method for measuring the surface quality of polished silicon slices by visual inspection (English Version)

Standard No.

GB/T 6624-2009

Language

Chinese, Available in English version

Release Date

2009

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 6624-2009

Replace

GB/T 6624-1995

Scope

This standard specifies the method for visually inspecting the surface quality of single crystal polished wafers under certain lighting conditions. This standard applies to the surface quality inspection of silicon polished wafers. The visual inspection of the surface quality of the epitaxial wafer can also refer to this method.

GB/T 6624-2009 Referenced Document

• GB/T 14264 Semiconductor materials-Terms and definitions

GB/T 6624-2009 history

• 2009 GB/T 6624-2009 Standard method for measuring the surface quality of polished silicon slices by visual inspection
• 1995 GB/T 6624-1995 Standard method for measuring the surface quality of polished silicon slices by visual inspection