ISO 11952:2014 PDF

Scope: This International Standard specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required. This International Standard has the following objectives: — to increase the comparability of measurements of geometrical quantities made using scanningprobe microscopes by traceability to the unit of length; — to define the minimum requirements for the calibration process and the conditions of acceptance; — to ascertain the instrument’s ability to be calibrated (assignment of a “calibrate-ability” category to the instrument); — to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); — to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using a scanning-probe microscope; — to define the requirements for reporting results.

ISO 11952:2014 Referenced Document

IEC/TS 62622:2012 Artificial gratings used in nanotechnology — Description and measurement of dimensional quality parameters
ISO 11039:2012 Surface chemical analysis - Scanning-probe microscopy - Measurement of drift rate
ISO 12179:2000 Geometrical Product Specifications (GPS) - Surface texture: Profile method - Calibration of contact (stylus) instruments
ISO 12853:1997 Optics and optical instruments - Microscopes - Information provided to the user
ISO 18115-2:2013 Surface chemical analysis.Vocabulary.Part 2: Terms used in scanning-probe microscopy
ISO 3274:1996 Geometrical Product Specifications (GPS) - Surface texture: Profile method - Nominal characteristics of contact (stylus) instruments
ISO 4287:1997 Geometrical Product Specification (GPS) - Surface texture: Profile method - Terms, definitions and surface texture parameters
ISO 4288:1996 Geometrical Product Specifications (GPS) - Surface texture: Profile method - Rules and procedures for the assessment of surface texture
ISO 5436-1:2000 Geometrical Product Specifications (GPS) - Surface texture: Profile method; Measurement standards - Part 1: Material measures
ISO Guide 30:1992 Terms and definitions used in connection with reference materials
ISO Guide 34:2009 General requirements for the competence of reference material producers
ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)

2019 ISO 11952:2019 Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
2014 ISO 11952:2014 Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems