ISO 11952:2019 PDF

Scope: This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required. This document has the following objectives: — to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length; — to define the minimum requirements for the calibration process and the conditions of acceptance; — to ascertain the instrument's ability to be calibrated (assignment of a “calibrate-ability” category to the instrument); — to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); — to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM; — to define the requirements for reporting results.

ISO 11952:2019 Referenced Document

ISO 11039 Surface chemical analysis - Scanning-probe microscopy - Measurement of drift rate
ISO 18115-2 Surface chemical analysis — Vocabulary — Part 2: Terms used in scanning-probe microscopy*， 2021-12-21 Update
ISO/IEC Guide 98-3 Uncertainty of measurement - Guide to the expression of uncertainty in measurement (GUM:1995). Extension to any number of output quantities

2019 ISO 11952:2019 Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
2014 ISO 11952:2014 Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems