GB/T 17359-2012
Microbeam analysis.Quantitative analysis using energy dispersive spectrometry (English Version)
- Standard No.
- GB/T 17359-2012
- Language
- Chinese, Available in English version
- Release Date
- 2012
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2024-07
- Replace By
- GB/T 17359-2023
- Latest
- GB/T 17359-2023
- Replace
- GB/T 17359-1998
- Scope
- This standard specifies the quantitative analysis method for a specific point or specific area on a sample with an energy spectrometer installed on a scanning electron microscope (SEM) or an electron microprobe (EPMA). Quantitative analysis refers to expressing the content of elements by mass fraction (or percentage). Proper identification of all elements in a sample is an essential part of quantitative analysis and, therefore, this standard also covers this aspect. This standard provides a variety of quantitative analysis methods by energy spectroscopy. This standard is suitable for the quantitative analysis of elements with a mass fraction higher than 1% using reference materials or "no standard sample" procedures. This standard has higher confidence in the analysis of elements with atomic numbers greater than 10. This standard also specifies the analysis method for light elements with atomic number less than 11. At present, there is no recognized accurate energy spectrometer (EDS) quantitative analysis method for light elements. The following are several EDS methods commonly used for light element analysis: a) Measure the peak area and compare the peak intensity. For reasons described in Appendix D, this method has greater uncertainties in the analytical results for light elements than for heavy elements. b) When it is known that light elements in the sample are combined stoichiometrically with heavy elements (Z>10), the concentration of this light element can be determined from the relative concentration ratios of other elements. This method is usually used for the determination of oxygen in silicate mineral samples. c) Calculate the concentration by difference method, that is, subtract the total percentage of elements that can be analyzed from 100% to get the percentage of light elements. This method can only be applied under the conditions of good beam stability and the measurement of at least one reference sample alone, and requires the accurate determination of other elements in the sample. Appendix D summarizes issues in the quantitative analysis of light elements in the presence of heavy elements. If an energy spectrometer and a spectrometer (WDS) are installed on the instrument, WDS can be used to overcome the low-energy spectral peak overlap problem in EDS analysis.
GB/T 17359-2012 Referenced Document
- GB/T 20726-2006 Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors
- GB/T 27025-2008 General requirements for the competence of testing and calibration laboratories
- ISO 14594 Microbeam analysis - Electron probe microanalysis - Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy*， 2014-10-01 Update
- ISO 16700:2004 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
GB/T 17359-2012 history
- 2023 GB/T 17359-2023 Microbeam analysis of elements with atomic number not less than 11 and energy spectrometry for quantitative analysis
- 2012 GB/T 17359-2012 Microbeam analysis.Quantitative analysis using energy dispersive spectrometry
- 1998 GB/T 17359-1998 General specification of X-ray EDS quantitative analysis for EPMA and SEM
