This standard specifies the technical requirements and specifications for the quantitative analysis method of X-ray energy spectrometer combined with electron probe and scanning electron microscope. This standard applies to the quantitative analysis of bulk samples by electron probe and scanning electron microscope X-ray energy spectrometer.
GB/T 17359-1998 history
2023GB/T 17359-2023 Microbeam analysis of elements with atomic number not less than 11 and energy spectrometry for quantitative analysis
2012GB/T 17359-2012 Microbeam analysis.Quantitative analysis using energy dispersive spectrometry
1998GB/T 17359-1998 General specification of X-ray EDS quantitative analysis for EPMA and SEM