ISO 16700:2004
Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
- Standard No.
- ISO 16700:2004
- Release Date
- 2004
- Published By
- International Organization for Standardization (ISO)
- Status
- Replace By
- ISO 16700:2016
- Latest
- ISO 16700:2016
- Scope
- This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.
ISO 16700:2004 Referenced Document
- ISO 5725-1:1994 Accuracy (trueness and precision) of measurement methods and results - Part 1: General principles and definitions
- ISO Guide 30:1992 Terms and definitions used in connection with reference materials
- ISO Guide 34:1996 Quality system guidelines for the production of reference materials
- ISO Guide 35:1989 Certification of reference materials - General and statistical principles
- ISO/IEC 17025:1999 General requirements for the competence of testing and calibration laboratories
ISO 16700:2004 history
- 2016 ISO 16700:2016 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
- 2004 ISO 16700:2004 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
