ISO 14594:2014 PDF

Scope: INTERNATIONAL STANDARD This International Standard gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer, and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume. This International Standard is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained can only be indicative for other experimental conditions. This International Standard is not designed to be used for energy dispersive X-ray spectroscopy.

ISO 14594:2014 Referenced Document

ISO/IEC 17025:2005 General requirements for the competence of testing and calibration laboratories

2014 ISO 14594:2014 Microbeam analysis - Electron probe microanalysis - Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
2009 ISO 14594:2003/Cor 1:2009 Microbeam analysis - Electron probe microanalysis - Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy; Technical Corrigendum 1
2003 ISO 14594:2003 Microbeam analysis - Electron microprobe analysis (Castaing Microprobe) - Guidelines for determining experimental parameters for wavelength dispersive spectrometry