This standard specifies the most important quantities that characterize the characteristics of X-ray energy spectrometers (EDS) based on semiconductor detectors, preamplifiers and signal processing systems. This standard is only applicable to semiconductor detectors EDS based on the state-of-the-art ionization principle. This standard only stipulates the minimum requirements for this type of EDS used in conjunction with electron probe (EPMA) or scanning electron microscope (SEM). As for how to realize the analysis, it is not within the scope of this standard.
GB/T 20726-2006 history
2015GB/T 20726-2015 Microbeam analysis.Selected instrumental performance parameters for the specification and checking of energy dispersive X-ray spectrometers for use in electron probe microanalysis
2006GB/T 20726-2006 Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors