GB/T 18867-2014 (English Version) PDF

Standard No.: GB/T 18867-2014
Language: Chinese, Available in English version
Release Date: 2014
Published By: General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest: GB/T 18867-2014
Replace: GB/T 18867-2002

Scope: This standard specifies the technical requirements, test methods, signs, packaging, storage and safety of sulfur hexafluoride. This standard applies to sulfur hexafluoride prepared by the direct reaction of sulfur and fluorine through refining and purification. This product is mainly used as a cleaning agent and plasma etchant for chemical vapor deposition chambers in the electronics industry. Molecular formula: SF₆. Relative molecular mass: 146.0564192 (calculated according to the international relative atomic mass in 2007).

GB/T 18867-2014 Referenced Document

GB 14193 Rules for filling of liquefied gas cylinders
GB 15258 General rules for preparation of precautionary label for chemicals
GB 16804 Precautionary labels for gas cylinders
GB 190 Packing symbol of dangerous goods
GB 5099 Seamless steel gas cylinders
GB 7144 Coloured cylinder mark for gases
GB/T 12022 Industrial sulfur hexafluoride
GB/T 26571 Specification for the shelf life of a specialty gas
GB/T 28726-2012 Gas analysis.Gas chromatograph with helium ionization detector
GB/T 3723 Sampling of chemical products for industrial use--Safety in sampling
GB/T 5832.1 Gas analysis—Determination of water—Part 1: Electrolytic method*， 2016-12-13 Update
GB/T 5832.3 Determination of moisture in gases.Part 3:The method of Cavity Ring-Down Spectroscopy
GB/T 8170 Rules of rounding off for numerical values & expression and judgement of limiting values