GB/T 18867-2002
Gases for electronic industry--Sulfur hexafluoride (English Version)
- Standard No.
- GB/T 18867-2002
- Language
- Chinese, Available in English version
- Release Date
- 2002
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2015-07
- Replace By
- GB/T 18867-2014
- Latest
- GB/T 18867-2014
- Scope
- This standard specifies the technical requirements, analysis methods, inspection rules and packaging, labeling, transportation, storage and safety requirements for gaseous sulfur hexafluoride products used in the electronics industry. This standard applies to high-purity sulfur hexafluoride produced by the reaction of sulfur and fluorine and refined and purified. This product is mainly used as plasma etchant, dopant, epitaxial gas or diluted carrier gas for electronic components, etc.
GB/T 18867-2002 history
- 2014 GB/T 18867-2014 Gases for electronic industry.Sulphur hexaflouride
- 2002 GB/T 18867-2002 Gases for electronic industry--Sulfur hexafluoride
