This standard specifies the technical requirements, test methods, inspection rules and requirements for marking, packaging, transportation and storage of vacuum coating equipment. This standard applies to vacuum evaporation, sputtering, and ion plating vacuum coating equipment (hereinafter referred to as equipment) with a pressure in the range of 10-5 Pa to 10-3 Pa.
GB/T 11164-2011 Referenced Document
GB 18209.1-2010 Electrical safety of machinery.Indication,marking and actuation.Part 1:Requirements for visual,acoustic and tactile signals
GB 5226.1-2008 Electrical safety of machinery - Electrical equipment for machinery - Part 1: General specifications