GB/T 11164-1999
Vacuum coating plant generic specification (English Version)
- Standard No.
- GB/T 11164-1999
- Language
- Chinese, Available in English version
- Release Date
- 1999
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2012-06
- Replace By
- GB/T 11164-2011
- Latest
- GB/T 11164-2011
- Scope
- This standard specifies the technical requirements, test methods, inspection rules, signs, packaging, transportation and storage of vacuum coating equipment. This standard is applicable to evaporation, sputtering and ion plating vacuum coating equipment (hereinafter referred to as equipment) with a pressure in the range of 10-4～10-3Pa.
GB/T 11164-1999 history
- 2011 GB/T 11164-2011 Vacuum coating plant generic specification
- 1999 GB/T 11164-1999 Vacuum coating plant generic specification
