This standard specifies the instrumental method for the determination of particles in electronic grade water. This standard applies to the continuous or single detection and counting of particles in electronic grade water. The measured particle size is greater than or equal to 0.5 μm, and the concentration of particles is (0 to 10 000) particles/mL.
GB/T 11446.9-1997 history
2013GB/T 11446.9-2013 Test method for particles in electronic grade water by instrument
1997GB/T 11446.9-1997 Test method for particles in electronic grade water by instrument