This part of GB/T 11446 specifies the grades, technical specification requirements, test methods and inspection rules of electronic grade water. This section applies to high-purity cleaning water used in the electronics and semiconductor industries.
GB/T 11446.1-2013 Referenced Document
GB/T 11446.10-2013 Test method for total bacterial count in electronic grade water by membrane filters
GB/T 11446.3-2013 Generic rules for test methods of electronic grade water
GB/T 11446.4-2013 Test method for resistivity of electronic grade water
GB/T 11446.5-2013 Test method for measuring trace metals in electronic grade water by atomic absorption spectrophotometry
GB/T 11446.6-2013 Test method for Si0<下标2> in electronic grade water by spectrophotometer
GB/T 11446.7-2013 Test method for trace anion in electronic grade water by ion chromatography
GB/T 11446.8-2013 Test method for total organic carbon in electronic grade water
GB/T 11446.9-2013 Test method for particles in electronic grade water by instrument