GB/T 25915.12-2021
Cleanrooms and associated controlled environments—Part 12: Specifications for monitoring of air cleanliness by nanoscale particle concentration (English Version)
- Standard No.
- GB/T 25915.12-2021
- Language
- Chinese, Available in English version
- Release Date
- 2021
- Published By
- 国家市场监督管理总局、中国国家标准化管理委员会
- Latest
- GB/T 25915.12-2021
- Scope
- This document gives technical requirements for monitoring the concentration of "nanoscale" particles with a particle size limit of no more than 0.1 μm (100 nm). The monitoring technical requirements given in this document are mainly for "dynamic". Note 1: The "nanoscale particles" mentioned in this document refer to all 1-dimensional particles (nanosheets).
GB/T 25915.12-2021 history
- 2021 GB/T 25915.12-2021 Cleanrooms and associated controlled environments—Part 12: Specifications for monitoring of air cleanliness by nanoscale particle concentration
GB/T 25915.12-2021 -All Parts
GB/T 25915.1-2021 Cleanrooms and associated controlled environments—Part 1: Classification of air cleanliness by particle concentration
GB/T 25915.10-2021 Cleanrooms and associated controlled environments—Part 10: Classification of surface cleanliness by chemical concentration
GB/T 25915.12-2021 Cleanrooms and associated controlled environments—Part 12: Specifications for monitoring of air cleanliness by nanoscale particle concentration
GB/T 25915.13-2022 Cleanrooms and associated controlled environments—Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
GB/T 25915.14-2022 Cleanrooms and Related Controlled Environments Part 14: Assessing Equipment Suitability by Particle Concentration
GB/T 25915.15-2022 Cleanrooms and Related Controlled Environments Part 15: Suitability of Equipment and Materials Based on Gaseous Chemical Concentrations
GB/T 25915.16-2024 Clean rooms and related controlled environments Part 16: Improving the energy efficiency of clean rooms and air purification units
GB/T 25915.2-2021 Cleanrooms and associated controlled environments—Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
GB/T 25915.3-2024 Clean rooms and related controlled environments Part 3: Testing methods
GB/T 25915.4-2010 Cleanrooms and associated controlled environments.Part 4:Design,construction and start-up
GB/T 25915.5-2010 Cleanrooms and associated controlled environments.Part 5:Operations
GB/T 25915.6-2010 Cleanrooms and associated controlled environments.Part 6:Vocabulary
GB/T 25915.7-2010 Cleanrooms and associated controlled environments.Part 7:Separative devices (clean air hoods,gloveboxes,isolators and minienvironments)
GB/T 25915.8-2021 Cleanrooms and associated controlled environments—Part 8: Classification of air cleanliness by chemical concentration (ACC)
GB/T 25915.9-2018 Cleanrooms and associated controlled environments—Part 9: Classification of surface cleanliness by particle concentration