GB/T 25915.2-2021
Cleanrooms and associated controlled environments—Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (English Version)

Standard No.

GB/T 25915.2-2021

Language

Chinese, Available in English version

Release Date

2021

Published By

国家市场监督管理总局、中国国家标准化管理委员会

Latest

GB/T 25915.2-2021

Replace

GB/T 25915.2-2010

Scope

This document specifies the basic requirements for a monitoring plan. This monitoring program monitors the performance of a cleanroom or clean zone in terms of air cleanliness by particle concentration, based on the measured concentration of suspended particulates in the air or other parameters affecting it. This document is applicable to the monitoring of the concentration of particles with a particle size of 0.1μm~5μm. This document does not apply to monitoring such as vibration or general maintenance of engineered systems. The monitoring of the concentration of ultrafine particles (particles smaller than 0.1 μm) will be specified in another standard.

GB/T 25915.2-2021 Referenced Document

• GB/T 25915.1-2021 Cleanrooms and associated controlled environments—Part 1: Classification of air cleanliness by particle concentration

GB/T 25915.2-2021 history

• 2021 GB/T 25915.2-2021 Cleanrooms and associated controlled environments—Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
• 2011 GB/T 25915.2-2010 Cleanrooms and associated controlled environments.Part 2: Specifications for testing and monitoring to prove continued compliance with GB/T 25915.1

GB/T 25915.2-2021 -All Parts