This document describes a convergent-beam electron diffraction method for the determination of the thickness of thin crystalline specimens by transmission electron microscopy/scanning transmission electron microscopy. This document is applicable to the determination of the thickness of thin crystal samples with a linear dimension ranging from tens of nanometers to hundreds of microns and a thickness ranging from tens of nanometers to hundreds of nanometers. Note: Since the thickness of thin samples in transmission electron microscopy is often not uniform, the local thickness of the sample illuminated by the electron beam is measured by the convergent beam diffraction method.
GB/T 20724-2021 Referenced Document
GB/T 18907-2013 Microbeam analysis.Analytical electron microscopy.Selected-area electron diffraction analysis using a transmission electron microscope
GB/T 27418-2017 Guide to the evaluation and expression of uncertainty in measurement
ISO 15932:2013 Microbeam analysis.Analytical electron microscopy.Vocabulary
GB/T 20724-2021 history
2021GB/T 20724-2021 Microbeam analysis—Method of thickness measurement for thin crystals by convergent beam electron diffraction
2006GB/T 20724-2006 Method of thickness measurement for thin crystal by convergent beam electron diffraction