ASTM E1127-08(2015)
Standard Guide for Depth Profiling in Auger Electron Spectroscopy

Standard No.

ASTM E1127-08(2015)

Release Date

2008

Published By

American Society for Testing and Materials (ASTM)

Latest

ASTM E1127-08(2015)

Scope

5.1 Auger electron spectroscopy yields information concerning the chemical and physical state of a solid surface in the near surface region. Nondestructive depth profiling is limited to this near surface region. Techniques for measuring the crater depths and film thicknesses are given in (1).5

5.2 Ion sputtering is primarily used for depths of less than the order of 1 μm.

5.3 Angle lapping or mechanical cratering is primarily used for depths greater than the order of 1 μm.

5.4 The choice of depth profiling methods for investigating an interface depends on surface roughness, interface roughness, and film thickness (2).

5.5 The depth profile interface widths can be measured using a logistic function which is described in Practice E1636.

1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy.

1.2 Guidelines are given for depth profiling by the following:

	Section
Ion Sputtering	6
Angle Lapping and Cross-Sectioning	7
Mechanical Cratering	8
Mesh Replica Method	9
Nondestructive Depth Profiling	10

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement a......

ASTM E1127-08(2015) Referenced Document

• ASTM E1078 Standard Guide for Procedures for Specimen Preparation and Mounting in Surface Analysis
• ASTM E1577 Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis
• ASTM E1634 Standard Guide for Performing Sputter Crater Depth Measurements
• ASTM E1636 Standard Practice for Analytically Describing Sputter-Depth-Profile Interface Data by an Extended Logistic Function
• ASTM E1829 Standard Guide for Handling Specimens Prior to Surface Analysis
• ASTM E673 Standard Terminology Relating to Surface Analysis
• ASTM E684 Standard Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces
• ASTM E827 Standard Practice for Indentifying Elements by the Peaks in Auger Electron Spectroscopy
• ASTM E996 Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

ASTM E1127-08(2015) history

• 2008 ASTM E1127-08(2015) Standard Guide for Depth Profiling in Auger Electron Spectroscopy
• 2008 ASTM E1127-08 Standard Guide for Depth Profiling in Auger Electron Spectroscopy
• 2003 ASTM E1127-03 Standard Guide for Depth Profiling in Auger Electron Spectroscopy
• 1991 ASTM E1127-91(1997) Standard Guide for Depth Profiling in Auger Electron Spectroscopy