ASTM E1127-03
Standard Guide for Depth Profiling in Auger Electron Spectroscopy

Standard No.

ASTM E1127-03

Release Date

2003

Published By

American Society for Testing and Materials (ASTM)

Status

Be replaced

Replace By

ASTM E1127-08

Latest

ASTM E1127-08(2015)

Scope

Auger electron spectroscopy yields information concerning the chemical and physical state of a solid surface in the near surface region. Nondestructive depth profiling is limited to this near surface region. Techniques for measuring the crater depths and film thicknesses are given in (35).

Ion sputtering is primarily used for depths of less than the order of 1 μm.

Angle lapping or mechanical cratering is primarily used for depths greater than the order of 1 μm.

The choice of depth profiling methods for investigating an interface depends on surface roughness, interface roughness, and film thickness (1).³

1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy.

1.2 Guidelines are given for depth profiling by the following:

	Section
Ion Sputtering	6
Angle Lapping and Cross-Sectioning	7
Mechanical Cratering	8
Nondestructive Depth Profiling	9

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

ASTM E1127-03 Referenced Document

• ASTM E1634 Standard Guide for Performing Sputter Crater Depth Measurements
• ASTM E673 Standard Terminology Relating to Surface Analysis
• ASTM E684 Standard Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces
• ASTM E827 Standard Practice for Indentifying Elements by the Peaks in Auger Electron Spectroscopy

ASTM E1127-03 history

• 2008 ASTM E1127-08(2015) Standard Guide for Depth Profiling in Auger Electron Spectroscopy
• 2008 ASTM E1127-08 Standard Guide for Depth Profiling in Auger Electron Spectroscopy
• 2003 ASTM E1127-03 Standard Guide for Depth Profiling in Auger Electron Spectroscopy
• 1991 ASTM E1127-91(1997) Standard Guide for Depth Profiling in Auger Electron Spectroscopy