GB/T 32189-2015 (English Version) PDF

Standard No.: GB/T 32189-2015
Language: Chinese, Available in English version
Release Date: 2016
Published By: General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest: GB/T 32189-2015

Scope: This standard specifies the method for testing the surface roughness of the chemically long-term single crystal substrate by atomic force microscope. This standard applies to nitrided homogeneous substrates grown by chemical vapor deposition and other methods with a surface roughness less than 10 nm. Other semiconductor single product substrates with similar surface structure shall be tested by the methods provided in this standard, and both sides of the test shall reach an agreement through negotiation.

GB/T 32189-2015 Referenced Document

GB/T 14264 Semiconductor materials-Terms and definitions
GB/T 27760 Test method for calibrating the z-magnification of an atomic force microscope at subnanometer displacement levels using Si(111) monatomic steps
GB/T 3505 Geometrical Product Specifications(GPS).Surface texture:Profile method.Terms,definitions and surface texture parameters
JJF 1351 Calibration Specification for Scanning Probe Microscopes

2016 GB/T 32189-2015 Atomic Force Microscopy Examination of Surface Roughness of Gallium Nitride Single Crystal Substrate