National Metrological Technical Specifications of the People's Republic of China
Latest
JJF 1351-2012
Scope
This specification is applicable to the calibration of scanning probe microscopes that take geometric surface topography as the measurement object. Scanning probe microscopes have different design principles, and relevant metrological characteristics need to be selected according to the actual situation during calibration. Measurement tasks with special requirements, such as measurements with high traceability requirements, are not within the scope of application of this calibration specification.