GB/T 27760-2011 (English Version) PDF

Standard No.: GB/T 27760-2011
Language: Chinese, Available in English version
Release Date: 2011
Published By: General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest: GB/T 27760-2011

Scope: This standard specifies the measurement method for calibrating the z-direction scale of the atomic force microscope by using the Si(111) crystal plane atomic step height sample. This standard is applicable to atomic force microscopes working in the atmosphere or vacuum environment, and its z-direction magnification reaches the maximum level, that is, the z-direction displacement is in the range of nanometers and sub-nanometers. This is the atomic force microscope used to detect semiconductor surfaces, optical devices Detection range frequently used on surfaces and other high-tech component surfaces. This standard does not point out all possible safety issues. Before applying this standard, the user is responsible for taking appropriate safety and health measures and ensuring compliance with the conditions stipulated in the relevant national regulations.

GB/T 27760-2011 Referenced Document

ISO 25178-6:2010 Geometrical product specifications (GPS) - Surface texture: Areal - Part 6: Classification of methods for measuring surface texture
ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)
ISO/TS 21748:2004 Guidance for the use of repeatability, reproducibility and trueness estimates in measurement uncertainty estimation

2011 GB/T 27760-2011 Test method for calibrating the z-magnification of an atomic force microscope at subnanometer displacement levels using Si(111) monatomic steps