KS L 1619-2013
Testing methods for resistivity of conductive fine ceramic thin films with four point probe array

Standard No.

KS L 1619-2013

Release Date

2013

Published By

Korean Agency for Technology and Standards (KATS)

Status

Withdraw

Replace By

KS L 1619-2013(2018)

Latest

KS L 1619-2023

Replace

KS L 1619-2003

Scope

This standard specifies a method for testing the resistivity of fine ceramic thin films by the four-probe method. The range of applicable resistivity is 1×10-5 Ωcm to 2×102 Ωcm, and the film thickness is 500 μm or less.

KS L 1619-2013 history

• 2023 KS L 1619-2023 Testing methods for resistivity of conductive fine ceramic thin films with four point probe array
• 0000 KS L 1619-2013(2018)
• 2013 KS L 1619-2013 Testing methods for resistivity of conductive fine ceramic thin films with four point probe array
• 2003 KS L 1619-2003 Test methods for measuring resistivity of electrically conductive ceramic thin films with four point probe method