ISO 11938:2012 PDF

Scope: This International Standard provides procedures for electron microprobe elemental-mapping analysis using wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is assessed. It describes five types of data processing: the raw X-ray intensity data method, the k-value method, the calibration method, the correlation method and the matrix correction method.

ISO 11938:2012 Referenced Document

ISO 14594 Microbeam analysis - Electron probe microanalysis - Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy*， 2014-10-01 Update
ISO 16592:2006 Microbeam analysis - Electron probe microanalysis - Guidelines for determining the carbon content of steels using a calibration curve method
ISO 17470 Microbeam analysis - Electron probe microanalysis - Guidelines for qualitative point analysis by wavelength dispersive X-ray spectrometry*， 2014-01-01 Update
ISO 22489 Microbeam analysis - Electron probe microanalysis - Quantitative point analysis for bulk specimens using wavelength dispersive X-ray spectroscopy*， 2016-10-01 Update
ISO 23833 Microbeam analysis - Electron probe microanalysis (EPMA) - Vocabulary*， 2013-04-01 Update
ISO 5725-6 Accuracy (trueness and precision) of measurement methods and results - Part 6: Use in practice of accuracy values; Technical Corrigendum 1
ISO/IEC 17025:2005 General requirements for the competence of testing and calibration laboratories

2012 ISO 11938:2012 Microbeam analysis - Electron probe microanalysis - Methods for elemental-mapping analysis using wavelength-dispersive spectroscopy