This standard specifies the technical requirements, test methods, packaging, marking, storage, transportation and safety of hydrogen used in the electronics industry. This standard applies to the hydrogen used in the electronics industry that is purified and produced from hydrogen in bottles, containers and pipelines. They are mainly used to provide a reducing atmosphere, as a carrier gas for epitaxy and as a gas distribution material for plasma etchant.
GB/T 16942-2009 Referenced Document
GB 14194-2006 Rules for filling of permanent gas cylinders