GB/T 16942-1997
Gases for electronic industry--Hydrogen (English Version)
- Standard No.
- GB/T 16942-1997
- Language
- Chinese, Available in English version
- Release Date
- 1997
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2010-05
- Replace By
- GB/T 16942-2009
- Latest
- GB/T 16942-2009
- Scope
- This standard specifies the technical requirements, test methods, packaging, marking, safety, etc. of hydrogen used in the electronics industry. This standard is applicable to cylinder-packed hydrogen produced by purifying industrial hydrogen as raw material. Hydrogen is mainly used to provide a reducing atmosphere, as a carrier gas for the epitaxial process and as a raw material for gas distribution of plasma etchant. Molecular formula: H2 Relative molecular mass: 2.016 (according to the international relative atomic mass in 1991)
GB/T 16942-1997 history
- 2009 GB/T 16942-2009 Gas for electronic industry.Hydrogen
- 1997 GB/T 16942-1997 Gases for electronic industry--Hydrogen
