ISO 16700:2016 PDF

Scope: This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.

ISO 16700:2016 Referenced Document

ISO 5725-1:1994 Accuracy (trueness and precision) of measurement methods and results - Part 1: General principles and definitions
ISO GUIDE 30:2015 Reference materials - Selected terms and definitions
ISO GUIDE 34:2009 General requirements for the competence of reference material producers
ISO GUIDE 35:2006 Reference materials - General and statistical principles for certification
ISO/IEC 17025:2005 General requirements for the competence of testing and calibration laboratories
ISO/IEC GUIDE 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)

2016 ISO 16700:2016 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
2004 ISO 16700:2004 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification