EN ISO 14644-1:2015 PDF

Scope: This part of ISO 14644 contains the classification of air purity in clean rooms and associated clean room areas as well as separative device (SD) modules according to ISO 14644-7 based on the concentration of airborne particles. For classification purposes, only particle groups are considered whose cumulative frequency distribution is based on the particle size threshold (lower (detection) limit), which ranges from 0.1 µm to 5 µm. The use of scattered light single particle counters (LSAPC, en. light scattering (discrete) airborne particle counter) is the basis for determining the concentration of airborne particles equal to and greater than the specified size range at designated sampling locations. This part of ISO 14644 does not apply to the classification of particle groups that fall outside the specified lower threshold (detection limit) of particle size in the range between 0.1 µm and 5 µm. Concentrations of ultrafine particles (nanoscale particles smaller than 0.1 µm) are addressed in another part of the set of standards, which defines air purity based on the particle concentration of airborne nanoparticles, while an M descriptor (see Appendix C) is used to quantify macroparticle groups (particles larger than 5 µm) may be used. This part of ISO 14644 is not suitable for the characterization of physical, chemical, radiological, viable (active) or other types of airborne particles.

EN ISO 14644-1:2015 Referenced Document

ASTM F312-08 Standard Test Methods for Microscopical Sizing and Counting Particles from Aerospace Fluids on Membrane Filters*， 2024-04-20 Update
ISO 14644-2:2015 Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
ISO 14644-7:2004 Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
ISO 21501-4:2007 Determination of particle size distribution - Single particle light interaction methods - Part 4: Light scattering airborne particle counter for clean spaces
JIS B 9920:2002 Classification of air cleanliness for cleanrooms

2015 EN ISO 14644-1:2015 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)
1999 EN ISO 14644-1:1999 Cleanrooms and Associated Controlled Environments - Part 1: Classification of Air Cleanliness