This standard specifies the classification of air cleanliness in clean rooms and related controlled environments (hereinafter referred to as clean room facilities) based on suspended particulate concentration, and the evaluation method thereof.
JIS B 9920:2002 history
2019JIS B 9920-1:2019 Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness by particle concentration
2002JIS B 9920:2002 Classification of air cleanliness for cleanrooms
1989JIS B 9920:1989 Measuring methods for airborne particles in clean room and evaluating methods for air cleanliness of clean room