ISO 29301:2017 PDF

Scope: This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).

ISO 29301:2017 Referenced Document

ISO 16700:2016 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
ISO 17034:2016 General requirements for the competence of reference material producers
ISO 5725-1:1994 Accuracy (trueness and precision) of measurement methods and results - Part 1: General principles and definitions
ISO GUIDE 30:2015 Reference materials - Selected terms and definitions
ISO GUIDE 35:2017 Certification of reference materials — General and statistical principles
ISO/IEC 17025:2005 General requirements for the competence of testing and calibration laboratories
ISO/IEC GUIDE 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)

2023 ISO 29301:2023 Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
2017 ISO 29301:2017 Microbeam analysis - Analytical electron microscopy - Methods for calibrating image magnification by using reference materials with periodic structures
2010 ISO 29301:2010 Microbeam analysis - Analytical transmission electron microscopy - Methods for calibrating image magnification by using reference materials having periodic structures