GB/T 14851-1993
Gas for electronic industry.Phosphine (English Version)
- Standard No.
- GB/T 14851-1993
- Language
- Chinese, Available in English version
- Release Date
- 1993
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2010-05
- Replace By
- GB/T 14851-2009
- Latest
- GB/T 14851-2009
- Scope
- This standard specifies the technical requirements, test methods, inspection rules, safety requirements, packaging, marking, transportation and storage of phosphine products. This standard is applicable to phosphine products obtained by thermal decomposition of phosphorous acid, hydrolysis of phosphide, reaction of elemental phosphorus with water or alkali and refined. It is mainly used for epitaxy, ion implantation and doping in the production of semiconductor devices and integrated circuits. Phosphine is a highly toxic, flammable, colorless gas with a smell of rotten fish, which can spontaneously ignite in high concentrations in the air. Molecular formula: PH3 Relative molecular mass: 33.9975 (according to the international atomic weight in 1989)
GB/T 14851-1993 history
- 2009 GB/T 14851-2009 Gas for electronic industry.Phosphine
- 1993 GB/T 14851-1993 Gas for electronic industry.Phosphine
