GB/T 14851-2009 (English Version) PDF

Standard No.: GB/T 14851-2009
Language: Chinese, Available in English version
Release Date: 2009
Published By: General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest: GB/T 14851-2009
Replace: GB/T 14851-1993

Scope: This standard specifies the technical requirements, test methods, packaging, marking, storage, transportation and safety of phosphine used in the electronics industry. This standard is applicable to phosphine products obtained by thermal decomposition of phosphorous acid, hydrolysis of phosphide, reaction of elemental phosphorus with water or alkali and refined. It is mainly used for epitaxy, ion implantation and doping in the production of semiconductor devices and integrated circuits.

GB/T 14851-2009 Referenced Document

GB 14193-2009 Rules for filling of liquefied gas cylinders
GB 190-2009 Packing symbol of dangerous goods
GB 5099-1994 Seamless steel gas cylinders
GB 7144-1999 Coloured cylinder mark for gases
GB/T 3723-1999 Sampling of chemical products for industrial use--Safety in sampling
GB/T 8984-2008 Determination of carbon monoxide, carbon dioxide and hydrocarbon in gases. Gas chromatographic method