GB/T 14144-1993
Test method for determination of radial interstitial oxygen variation in silicon (English Version)

Standard No.

GB/T 14144-1993

Language

Chinese, Available in English version

Release Date

1993

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Status

Be replaced 2010-06

Replace By

GB/T 14144-2009

Latest

GB/T 14144-2009

Scope

This standard specifies the measurement method for radial variation of interstitial oxygen content in silicon crystals. This standard is applicable to the measurement of the radial variation of interstitial oxygen content in silicon crystals with room temperature resistivity greater than 0.1Ω·cm. The measurement range is from 3.5×1015at·cm3 to the maximum solid solubility of interstitial oxygen in silicon.

GB/T 14144-1993 history

• 2009 GB/T 14144-2009 Testing method for determination of radial interstitial oxygen variation in silicon
• 1993 GB/T 14144-1993 Test method for determination of radial interstitial oxygen variation in silicon