YS/T 15-2015
Determination of thickness of silicon epitaxial layer and diffusion layer by grinding angle dyeing method (English Version)

Standard No.

YS/T 15-2015

Language

Chinese, Available in English version

Release Date

2015

Published By

Professional Standard - Non-ferrous Metal

Latest

YS/T 15-2015

Replace

YS/T 15-1991

YS/T 15-2015 history

• 2015 YS/T 15-2015 Determination of thickness of silicon epitaxial layer and diffusion layer by grinding angle dyeing method
• 1991 YS/T 15-1991 Determination of silicon epitaxial layer and diffusion thickness by grinding angle staining method