YS/T 15-1991
Determination of silicon epitaxial layer and diffusion thickness by grinding angle staining method (English Version)
- Standard No.
- YS/T 15-1991
- Language
- Chinese, Available in English version
- Release Date
- 1991
- Published By
- Professional Standard - Non-ferrous Metal
- Status
- 2015-10
- Replace By
- YS/T 15-2015
- Latest
- YS/T 15-2015
YS/T 15-1991 history
- 2015 YS/T 15-2015 Determination of thickness of silicon epitaxial layer and diffusion layer by grinding angle dyeing method
- 1991 YS/T 15-1991 Determination of silicon epitaxial layer and diffusion thickness by grinding angle staining method
