KS D 0261-2012
Visual inspection for silicon wafers with specular surfaces

Standard No.

KS D 0261-2012

Release Date

2012

Published By

Korean Agency for Technology and Standards (KATS)

Status

Be replaced

Replace By

KS D 0261-2012(2017)

Latest

KS D 0261-2022

Replace

KS D 0261-2002

Scope

This standard specifies silicon wafers for semiconductor devices that have been mirror-finished using chemical and mechanical methods.

KS D 0261-2012 history

• 2022 KS D 0261-2022 Visual inspection for silicon wafers with specular surfaces
• 0000 KS D 0261-2012(2017)
• 2012 KS D 0261-2012 Visual inspection for silicon wafers with specular surfaces
• 0000 KS D 0261-2002