ISO 13095:2014 PDF

Scope: This International Standard specifies two methods for characterizing the shape of an AFM probpe tip， Specifically the shank and approximate tip profiles. These methods project the profile ofan AFM probe tip onto a given plane, and the characteristics of the probe Shank are also projected onto that plane under defined operating conditions. The latter indicates the usefulness of a_ given probe for depth measurements in narrow trenches and Similar profiles. This International Standard is applicable to the probes with radii greaterthan 50, where uo is the uncertainty ofthe width ofthe ridge Structure in the reference Sample used to characterize the probe.

ISO 13095:2014 Referenced Document

ISO 11039:2012 Surface chemical analysis - Scanning-probe microscopy - Measurement of drift rate
ISO 11952:2014 Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems
ISO 18115-2:2010 Analyse chimique des surfaces — Vocabulaire — Partie 2: Termes utilisés en microscopie à sonde à balayage (Première édition)
ISO/TS 80004-4:2011 Nanotechnologies - Vocabulary - Part 4: Nanostructured materials

2014 ISO 13095:2014 Surface Chemical Analysis - Atomic force microscopy - Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement