GB/T 31227-2014
Test method for the surface roughness by atomic force microscope for sputtered thin films (English Version)

Standard No.

GB/T 31227-2014

Language

Chinese, Available in English version

Release Date

2014

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 31227-2014

Scope

This standard specifies a method for measuring surface roughness using an atomic force microscope (AFM). This standard is applicable to the measurement of thin films produced by sputtering film formation method with an average roughness Ra of less than 100 nm. The measurement of surface roughness of other non-sputtered films can refer to this method.

GB/T 31227-2014 Referenced Document

• GB/T 27760-2011 Test method for calibrating the z-magnification of an atomic force microscope at subnanometer displacement levels using Si(111) monatomic steps

GB/T 31227-2014 history

• 2014 GB/T 31227-2014 Test method for the surface roughness by atomic force microscope for sputtered thin films