EN ISO 14644-8:2013
Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)

Standard No.
EN ISO 14644-8:2013
Release Date
2013
Published By
European Committee for Standardization (CEN)
Status
 2022-10
Replace By
EN ISO 14644-8:2022
Latest
EN ISO 14644-8:2022
Replace
FprEN ISO 14644-8:2012
Scope
This part of ISO 14644 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification. This part of ISO 14644 currently considers only concentrations of air chemical contaminants between 100 and 10−12 g/m3 under cleanroom operational conditions.This part of ISO 14644 is not relevant for application in those industries, processes or productions where the presence of airborne chem

EN ISO 14644-8:2013 Referenced Document

  • ISO 14644-6:2007 Cleanrooms and associated controlled environments - Part 6: Vocabulary

EN ISO 14644-8:2013 history

  • 2022 EN ISO 14644-8:2022 Cleanrooms and associated controlled environments - Part 8: Assessment of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2022)
  • 2013 EN ISO 14644-8:2013 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)
  • 2006 EN ISO 14644-8:2006 Cleanrooms and associated controlled environments - Part 8: Classification of airborne molecular contamination



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