EN ISO 14644-8:2022
Cleanrooms and associated controlled environments - Part 8: Assessment of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2022)

Standard No.
EN ISO 14644-8:2022
Release Date
2022
Published By
European Committee for Standardization (CEN)
Status
 2023-01
Latest
EN ISO 14644-8:2022
Scope
This document establishes typical assessment processes to determine grading levels of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category), and provides a protocol to include test methods, analysis and time-weighted factors for their determination. This document currently considers only concentrations of air chemical contaminants between 100 g/m3 and 10−12 g/m3 under cleanroom operational conditions. This document is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process. It is not the intention of this document to describe the nature of air chemical contaminants. This document does not give a classification of surface chemical contamination.

EN ISO 14644-8:2022 history

  • 2022 EN ISO 14644-8:2022 Cleanrooms and associated controlled environments - Part 8: Assessment of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2022)
  • 2013 EN ISO 14644-8:2013 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)
  • 2006 EN ISO 14644-8:2006 Cleanrooms and associated controlled environments - Part 8: Classification of airborne molecular contamination



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