GB/T 15862-2012
General specification of ion implantation equipment (English Version)

Standard No.
GB/T 15862-2012
Language
Chinese, Available in English version
Release Date
2012
Published By
General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest
GB/T 15862-2012
Replace
GB/T 15862-1995
Scope
This standard specifies the terminology, product classification, technical requirements, tests, inspection rules and signs, packaging, transportation and storage of ion implanters. This standard applies to electric energy ion implanters used in semiconductor technology. Other ion implanters can also be used with reference.

GB/T 15862-2012 Referenced Document

  • GB 18209.1 Electrical safety of machinery.Indication,marking and actuation.Part 1:Requirements for visual,acoustic and tactile signals
  • GB/T 13384-1992 General speifications for packagings of mechanical and electrical products
  • GB/T 191 Packaging.Pictorial marking for handling of goods
  • GB/T 4857.7-2005 Packaging-Basic tests for transport packages-Part 7:Sinusoidal vibration test method at constant frequency
  • GB/T 5080.7-1986 Equipment reliability testing--Compliance test plans for failure rate and mean time between failures assuming constant failure rate
  • GB/T 6388-1986 Transport package shipping mark
  • SJ/T 10674 Generic specification for coating with coat
  • SJ/T 142 General specification for special equipment for electronic industry

GB/T 15862-2012 history

General specification of ion implantation equipment



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