This standard specifies the terminology, product classification, technical requirements, tests, inspection rules and signs, packaging, transportation and storage of ion implanters. This standard applies to electric energy ion implanters used in semiconductor technology. Other ion implanters can also be used with reference.
GB/T 15862-2012 Referenced Document
GB 18209.1 Electrical safety of machinery.Indication,marking and actuation.Part 1:Requirements for visual,acoustic and tactile signals
GB/T 13384-1992 General speifications for packagings of mechanical and electrical products
GB/T 191 Packaging.Pictorial marking for handling of goods
GB/T 4857.7-2005 Packaging-Basic tests for transport packages-Part 7:Sinusoidal vibration test method at constant frequency
GB/T 5080.7-1986 Equipment reliability testing--Compliance test plans for failure rate and mean time between failures assuming constant failure rate