This standard specifies the terms and definitions, markings, materials, requirements, test methods, inspection rules, marking, packaging, transportation and storage of quartz glass diffusion tubes for solar cell silicon wafers (hereinafter referred to as quartz glass diffusion tubes). This standard applies to transparent quartz glass tubes with an outer diameter greater than or equal to 200mm and a length greater than 2000mm, used in the diffusion process of solar cell silicon wafers.
JC/T 2066-2011 Referenced Document
JC/T 181-2011 Transparent quartz glass devices for semiconductor
JC/T 597-2011 Transparent quartz glass tubes for semiconductor
JC/T 2066-2011 history
2011JC/T 2066-2011 Quartz glass diffusion tubes for silicon for solar cell