This standard specifies the terms and definitions, classification and labeling, materials, requirements, test methods, inspection rules, marking, packaging, transportation and storage of transparent quartz glass devices for semiconductors. This standard applies to transparent quartz glass devices used in the production of the semiconductor industry, including transparent quartz glass diffusion tubes, transparent quartz glass boats, transparent quartz glass insulation barrels, transparent quartz brackets, transparent quartz bottles, transparent quartz cleaning tanks, etc. Transparent quartz glass devices for other uses may refer to this standard.
JC/T 181-2011 Referenced Document
JC/T 2064-2011 Transparent quartz glass rods for semiconductor
JC/T 597-2011 Transparent quartz glass tubes for semiconductor
JC/T 181-2011 history
2011JC/T 181-2011 Transparent quartz glass devices for semiconductor