ASTM E2245-11
Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer

Standard No.

ASTM E2245-11

Release Date

2011

Published By

American Society for Testing and Materials (ASTM)

Status

Be replaced

Replace By

ASTM E2245-11e1

Latest

ASTM E2245-11(2018)

Scope

Residual strain measurements are an aid in the design and fabrication of MEMS devices. The value for residual strain is used in Youngrsquo;modulus calculations.

1.1 This test method covers a procedure for measuring the compressive residual strain in thin films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an interferometer. Measurements from fixed-fixed beams that are touching the underlying layer are not accepted.

1.2 This test method uses a non-contact optical interferometer with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

ASTM E2245-11 Referenced Document

• ASTM E2244 Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer
• ASTM E2246 Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
• ASTM E2444 Terminology Relating to Measurements Taken on Thin, Reflecting Films
• ASTM E2530 Standard Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps

ASTM E2245-11 history

• 2018 ASTM E2245-11(2018) Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer
• 2011 ASTM E2245-11e1 Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer
• 2011 ASTM E2245-11 Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer
• 2005 ASTM E2245-05 Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer
• 2002 ASTM E2245-02 Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer