General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
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GB/T 26250-2010
Scope
This standard specifies the technical requirements, test methods, packaging, marking, storage, transportation and safety of arsine. This standard applies to arsine obtained from the reaction of arsenic compounds with acids. In the fabrication of semiconductor devices, arsine is used for doping and compound semiconductor epitaxy.
GB/T 26250-2010 Referenced Document
GB 14193 Rules for filling of liquefied gas cylinders