BS ISO 16700:2004
Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification

Standard No.

BS ISO 16700:2004

Release Date

2004

Published By

British Standards Institution (BSI)

Status

Be replaced 2016-07

Replace By

BS ISO 16700:2016

Latest

BS ISO 16700:2016

Replace

00/124017 DC:2000

Scope

This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.

BS ISO 16700:2004 history

• 2016 BS ISO 16700:2016 Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification
• 2004 BS ISO 16700:2004 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification