GB/T 15909-2009
Gas for electronic industry-Silane (English Version)
- Standard No.
- GB/T 15909-2009
- Language
- Chinese, Available in English version
- Release Date
- 2009
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2017-12
- Replace By
- GB/T 15909-2017
- Latest
- GB/T 15909-2017
- Replace
- GB/T 15909-1995
- Scope
- This standard specifies the technical requirements, test methods, packaging, marking, storage, transportation and safety of silane gas. This standard is applicable to epitaxial deposition of polysilicon and single crystal silicon, low-temperature chemical vapor deposition of silicon dioxide, and deposition of amorphous silicon films in the electronics industry.
GB/T 15909-2009 Referenced Document
- GB 11640 Seamless aluminum alloy gas cylinders *， 2011-12-30 Update
- GB 14193 Rules for filling of liquefied gas cylinders
- GB 190-2009 Packing symbol of dangerous goods
- GB 5099-1994 Seamless steel gas cylinders
- GB 7144-1999 Coloured cylinder mark for gases
- GB/T 3723-1999 Sampling of chemical products for industrial use--Safety in sampling
- GB/T 5832.1-2003 Determination of moisture in gases--Part 1: Electrolytic method
- GB/T 8984-2008 Determination of carbon monoxide, carbon dioxide and hydrocarbon in gases. Gas chromatographic method
GB/T 15909-2009 history
- 2017 GB/T 15909-2017 Gas for electronic industry—Silane
- 2009 GB/T 15909-2009 Gas for electronic industry-Silane
- 1995 GB/T 15909-1995 Gas for electronic industry--Silane
