GB/T 6624-1995
Standard method for measuring the surface quality of polished silicon slices by visual inspection (English Version)

Standard No.

GB/T 6624-1995

Language

Chinese, Available in English version

Release Date

1995

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Status

Be replaced 2010-06

Replace By

GB/T 6624-2009

Latest

GB/T 6624-2009

Scope

This standard specifies the method for visually inspecting the surface quality of silicon single crystal single-sided polished wafers (hereinafter referred to as polished wafers) under certain lighting conditions. This standard applies to the surface quality inspection of silicon polished wafers.

GB/T 6624-1995 history

• 2009 GB/T 6624-2009 Standard method for measuring the surface quality of polished silicon slices by visual inspection
• 1995 GB/T 6624-1995 Standard method for measuring the surface quality of polished silicon slices by visual inspection